High‐Efficiency and Low‐Intensity Threshold Femtosecond Laser Direct Writing of Precise Metallic Micropatterns on Transparent Substrate
High‐Efficiency and Low‐Intensity Threshold Femtosecond Laser Direct Writing of Precise Metallic Micropatterns on Transparent Substrate
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DOI：
10.1002/admt.202201610
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发表时间：
2023-01
影响因子：
6.8
通讯作者：
Mengyang Cui;Ting-Yun Huang;Zeyu Peng;Lingrong Xing;Zheng Zhou;Liang Guo;Jianli Wang;Jiejie Xu;R. Xiao
中科院分区：
文献类型：
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作者：
Mengyang Cui;Ting-Yun Huang;Zeyu Peng;Lingrong Xing;Zheng Zhou;Liang Guo;Jianli Wang;Jiejie Xu;R. Xiao
激光直写是一种很有前途的方法，可以在透明衬底上制备满足电子和光学标准的透明电子电路的金属微图形。然而，对于光化学和光热LDW来说，高效和精确的图案化仍然是一个挑战。本文提出了一种利用飞秒激光通过光敏粒子的单光子吸收实现高效光热过程的新方法。分散的光敏粒子作为众多的加热源，通过热诱导金属离子还原，实现同时的多位置光热反应和高效的金属化。该方法有效地利用了飞秒激光超短脉冲良好的热输入调节能力，实现了很高的温度可控性和精度。结果表明，在沉积速率为≈107µm~3 S−1，电阻率为≈10−7Ωm的情况下，与已报道的FsLDW相比，效率和电阻率至少提高了一个数量级。利用SPA-FsLDW制作了自供电传感器，验证了其实用性。
Laser direct writing (LDW) is a promising approach for fabricating metallic micropatterns on transparent substrates for transparent electronic circuits that satisfy both electronic and optical criteria. However, high efficiency and precision patterning remain a challenge for both photochemical and photothermal LDW. Herein, a novel method is proposed with a femtosecond laser to achieve a highly‐efficient photothermal process via single‐photon absorption by photosensitive particles (SPA‐FsLDW). The dispersive photosensitive particles act as numerous heating sources, enabling simultaneous multiple‐location photothermal reactions and highly‐efficient metallization due to heat‐induced metal ion reduction. The new approach effectively exploits the excellent heat‐input regulation with the ultrashort pulse of the femtosecond laser to achieve great temperature controllability and precision. It is shown that, with a deposition rate of ≈107 µm3 s−1 and electrical resistivity of ≈10−7 Ω m, SPA‐FsLDW improves efficiency and electrical resistivity by at least one order of magnitude compared to previously reported FsLDW. A self‐powered sensor is fabricated using SPA‐FsLDW, demonstrating its practical applicability.