Effects of Y2O3 and yttrium aluminates as sintering additives on the thermal conductivity of AlN ceramic substrates
Effects of Y2O3 and yttrium aluminates as sintering additives on the thermal conductivity of AlN ceramic substrates
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DOI：
10.1016/j.ceramint.2018.07.178
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发表时间：
2018-11-01
影响因子：
5.2
通讯作者：
Liu, Guanghua
中科院分区：
文献类型：
--
作者：
Huang, Dong;Tian, Zhaobo;Liu, Guanghua
采用流延成型和1850 ℃下无压烧结10 h制备AlN陶瓷基板，添加8wt%Y2O3和Y3 Al 5 O 12（YAG）、YAlO 3（雅普）和Y 4Al 2 O 9（YAM）的铝酸钇作为烧结添加剂。讨论了烧结助剂对AlN陶瓷的相组成、显微结构、热导率和抗弯强度的影响。以Y2 O3、YAG、雅普和YAM为烧结助剂，烧结AlN陶瓷中的第二相为YAM、YAG、雅普+ YAG和YAM +雅普，AlN晶粒的平均尺寸分别为5.5、3.6、4.4和4.9 μ m。随着Y_2O_3/Al_2O_3比的降低，烧结助剂的顺序为Y_2O_3> YAM >雅普> YAG，烧结AlN陶瓷的热导率和抗弯强度均降低。以Y2 O3为烧结助剂，烧结AlN样品的最大热导率为205 W/（m K），抗弯强度为295 MPa。
AlN ceramic substrates are prepared by tape casting and presureless sintering at 1850 degrees C for 10 h, with 8 wt% Y2O3 and yttrium aluminates of Y3Al5O12 (YAG), YAlO3 (YAP), and Y4Al2O9 (YAM) as sintering additives. The effects of the sintering additives on the phase assemblage, microstructure, thermal conductivity, and bending strength of the sintered AlN ceramics are discussed. With Y2O3, YAG, YAP, and YAM as sintering additives, the secondary phases in the sintered AlN ceramics are YAM, YAG, YAP + YAG, and YAM + YAP, and the average sizes of AlN grains are 5.5, 3.6, 4.4, and 4.9 mu m, respectively. In the order of sintering additives with decreasing Y2O3/Al2O3 ratio, viz. Y2O3 > YAM > YAP > YAG, both the thermal conductivity and bending strength of the sintered AlN ceramics decrease. With Y2O3 as the sintering additive, the sintered AlN sample shows the maximum thermal conductivity of 205 W/(m K) and bending strength of 295 MPa.