Wireless micromachined ceramic pressure sensor for high-temperature applications
Wireless micromachined ceramic pressure sensor for high-temperature applications
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DOI：
10.1109/jmems.2002.800939
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发表时间：
2002-08-01
影响因子：
2.7
通讯作者：
Allen, MG
中科院分区：
文献类型：
--
作者：
Fonseca, MA;English, JM;Allen, MG
在高温应用中，例如涡轮机发动机和压缩机中的压力传感，需要高温材料和数据检索方法。微电子封装基础设施提供了高温陶瓷材料、制造工具和成熟的加工技术，这些技术在高温传感方面具有潜在的适用性。基于这种基础设施，一个完全被动的陶瓷压力传感器，使用无线遥测方案已经开发出来。遥测的无源性质消除了对电子器件、电源或接触的需要，以承受高温环境。该传感器包含一个无源LC谐振器，由一个可移动的膜片电容器和一个固定的电感器组成，从而使传感器的谐振频率是压力相关的。通过外部环形天线检索数据。传感器已被制造和表征，并与机电模型进行了比较。它在0至7巴的压力范围内在高达400 ℃下操作。三种典型传感器的平均灵敏度和准确度分别为：-141 kHz Bar（-1）和24 mbar。
In high-temperature applications, such as pressure sensing in turbine engines and compressors, high-temperature materials and data retrieval methods are required. The microelectronics packaging infrastructure provides high-temperature ceramic materials, fabrication tools, and well-developed processing techniques that have the potential for applicability in high-temperature sensing. Based on this infrastructure, a completely passive ceramic pressure sensor that uses a wireless telemetry scheme has been developed. The passive nature of the telemetry removes the need for electronics, power supplies, or contacts to withstand the high-temperature environment. The sensor contains a passive LC resonator comprised of a movable diaphragm capacitor and a fixed inductor, thereby causing the sensor resonant frequency to be pressure-dependent. Data is retrieved with an external loop antenna. The sensor has been fabricated and characterized and was compared with an electromechanical model. It was operated up to 400 degreesC in a pressure range from 0 to 7 Bar. The average sensitivity and accuracy of three typical sensors are: -141 kHz Bar(-1) and 24 mbar, respectively.