THEORETICAL-STUDY ON SAW CHARACTERISTICS OF LAYERED STRUCTURES INCLUDING A DIAMOND LAYER
THEORETICAL-STUDY ON SAW CHARACTERISTICS OF LAYERED STRUCTURES INCLUDING A DIAMOND LAYER
复制标题
DOI：
10.1109/58.384444
复制
发表时间：
1995-05-01
影响因子：
3.6
通讯作者：
FUJIMORI, N
中科院分区：
文献类型：
--
作者：
NAKAHATA, H;HACHIGO, A;FUJIMORI, N
金刚石在所有材料中具有最高的表面声波（SAW）速度，因此当它与压电薄膜结合时可以为高频SAW器件的制造提供很多优势。通过理论计算检验了由压电材料层、金刚石层和基底组成的层状结构的基本声表面波特性。研究发现，瑞利模式声表面波在 ZnO/金刚石/Si、LiNbO3/金刚石/Si 和 LiTaO3/金刚石/Si 结构中传播，其声表面波速度高达 12,000 m/s，机电耦合系数为 1% 至 11%。研究还发现，SiO2/ZnO/金刚石/Si结构可以实现零频率温度系数、8,000-9,000 m/s的高相速度和高达4%的大机电耦合系数。
Diamond has the highest surface acoustic wave (SAW) velocity among all materials and thus can provide much advantage for fabrication of high frequency SAW devices when it is combined with a piezoelectric thin film. Basic SAW properties of layered structures consisting of a piezoelectric material layer, a diamond layer and a substrate were examined by theoretical calculation. Rayleigh mode SAW's with large SAW velocities up to 12,000 m/s and targe electro-mechanical coupling coefficients from 1 to 11% were found to propagate in ZnO/diamond/Si, LiNbO3/diamond/Si and LiTaO3/diamond/Si structures. It was also found that a SiO2/ZnO/diamond/Si structure can realize a zero temperature coefficient of frequency with a high phase velocity of 8,000-9,000 m/s and a large electro-mechanical coupling coefficient of up to 4%.