Effect of bottom electrodes on dielectric properties of high frequency Ba0.5Sr0.5TiO3 parallel plate varactor
Effect of bottom electrodes on dielectric properties of high frequency Ba0.5Sr0.5TiO3 parallel plate varactor
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DOI：
10.1016/j.tsf.2009.09.063
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发表时间：
2010-03
期刊：
影响因子：
2.1
通讯作者：
S. Sheng;Xiao-Yu Zhang;Peng Wang;C. Ong
中科院分区：
文献类型：
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作者：
S. Sheng;Xiao-Yu Zhang;Peng Wang;C. Ong
制备了三种不同底电极的Ba{sub 0.5}Sr{sub 0.5}TiO{sub 3} （BST）薄膜平行板变容管。三种变容管的底电极分别为钙钛矿导电氧化物La{sub 0.7}Sr{sub 0.3}MnO{sub 3} （LSMO）、Pt和Au。在10 MHz ~ 15 GHz频率范围内对BST薄膜的介电性能进行了表征。采用x射线衍射和扫描电镜对BST薄膜的微观结构进行了研究。显微组织分析表明，在LSMO和Pt底电极上生长的BST薄膜是具有柱状晶粒的多晶结构。电介质测量表明，生长在LSMO底电极上的BST薄膜具有最大的介电常数和稍高的损耗正切。
Three types of Ba{sub 0.5}Sr{sub 0.5}TiO{sub 3} (BST) thin film parallel plate varactor with different bottom electrodes were fabricated. The bottom electrodes of three types of varactor were perovskite conducting oxide La{sub 0.7}Sr{sub 0.3}MnO{sub 3} (LSMO), Pt and Au, respectively. Dielectric properties of the BST thin films were characterized in the frequency range from 10 MHz to 15 GHz. The microstructure of the BST thin films was investigated by X-ray diffraction and scanning electron microscope. The microstructural analysis shows that the BST thin films grown on LSMO and Pt bottom electrodes are polycrystalline textured with columnar grains. Dielectric measurement indicates that the BST thin film grown on LSMO bottom electrode has a maximum dielectric constant and a little higher loss tangent.