Device fabrication on curvilinear two-dimensional surfaces using polymer probes
Device fabrication on curvilinear two-dimensional surfaces using polymer probes
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DOI：
10.1016/j.polymer.2021.123521
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发表时间：
2021-02
期刊：
影响因子：
4.6
通讯作者：
Nathalie Becerra-Mora;P. Rajasekaran;K. Voss;V. Kollipara;P. Kohli
中科院分区：
文献类型：
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作者：
Nathalie Becerra-Mora;P. Rajasekaran;K. Voss;V. Kollipara;P. Kohli
在文献中广泛展示了在平坦表面上使用柔性和硬探针在具有油墨和基底的过多组合的亚100 nm特征的平坦表面上沉积分子。然而，在曲线二维基底上沉积和去除荧光分子以及金属图案化的研究却很少。在这项研究中，使用由聚二甲基硅氧烷和聚丙烯酰胺组成的圆锥形和金字塔形探针来存款和去除平面和曲线表面上的薄涂层。通过使用基于探针的图案化制造微尺度叉指电极来展示在弯曲表面上的微光电检测器器件的制造。一个全面的表征，利用光学，电子和原子力显微镜，和X射线光谱测量的探针和图案化的基板。讨论了基于纳米多孔和无孔探针的图案的图案容量、速度和质量的差异。聚丙烯酰胺水凝胶的固有多孔性和柔性允许储存大量的蚀刻剂，从而促进荧光油墨和银膜在平面和曲线表面上的微尺度图案化。含有0.9-1.2 nmol罗丹明6 G的单一聚丙烯酰胺探针储存在聚合物基质中，允许以约1800 μm2/s的面积速度在约2.1 mm 2的面积上进行微尺度图案化。通过改变探针与衬底的接触面积，实现了图案尺寸的调制。实验结果表明，探针在z轴上的位移与图案化区域之间存在线性相关性，这与本文提出的物理模型吻合得很好。重要的是，发现微图案的质量取决于探针-衬底界面能-在低表面能衬底上获得高质量图案。最后，我们展示了通过选择性地从表面去除银，然后沉积有机电子给体-受体对，在曲率半径（k）≥ 0.14 mm− 1的二维曲线表面上制造微型光电探测器。一般来说，聚合物光刻编辑器允许在平面和非平面表面上制造器件- PLE是传统微制造技术的替代工具。
Deposition of molecules on flat surfaces with sub-100 nm features of a plethora of combinations of inks and substrates, using flexible and hard probes on flat surfaces is extensively demonstrated in literature. However, the studies on the deposition and removal of fluorescent molecules and metal patterning on curvilinear two-dimensional substrates are scarce. In this study, conical and pyramidal probes composed of polydimethylsiloxane and polyacrylamide were used to deposit and remove thin coatings on planar and curvilinear surfaces. Fabrication of micro-photodetector devices on curved surfaces is demonstrated by fabricating microscale inter-digitated electrodes using probe-based patterning. A comprehensive characterization utilizing optical, electron and atomic force microscopy, and x-ray spectroscopic measurements of the probes and patterned substrates is presented. Differences in pattern capacity, speed, and quality of patterns based on nano-porous and non-porous probes is discussed. The inherent porosity and flexibility of polyacrylamide hydrogels allowed storage of large amounts of etchants facilitating microscale patterning of fluorescent inks and silver films on planar and curvilinear surfaces. A single polyacrylamide probe containing 0.9–1.2 nmol of rhodamine 6G stored within the polymeric matrix, allowed microscale patterning of an area of approximately 2.1 mm2at an areal speed of ~1800 μm2/s. The modulation of size of the patterns was accomplished by changing the tip-substrate contact area. The experimental results showed a linear correlation between the displacement of the probe in the z-axis and the patterned area which agreed well with a physical model presented here. Importantly, the quality of micro-patterns was found to depend upon probe-substrate interfacial surface energy — high-quality patterns were obtained on low surface energy substrates. Finally, we demonstrated the fabrication of micro-photodetectors on two-dimensional curvilinear surfaces that posssessed a radius of curvature (k) ≈ 0.14 mm−1by selectively removing silver from the surfaces followed by deposition of organic electron donor-acceptor pairs. In general, polymer lithography editor allows fabrication of devices on both planar and non-planar surfaces — PLE is an alternative tool to conventional microfabrication techniques.