Precision alignment and assembly of a Fourier transform microspectrometer
Precision alignment and assembly of a Fourier transform microspectrometer
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傅里叶变换微型光谱仪的精密对准和组装
DOI：
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发表时间：
2009
期刊：
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通讯作者：
H. Stephanou
中科院分区：
文献类型：
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作者：
Aditya N. Das;D. Popa;J. Sin;H. Stephanou
集成光学与MEMS提出了许多挑战，在组装和连接的异质组件，严格对齐的零件，包装的设备，以保护它，等微光谱仪的MOEMS设备的例子，这些问题发挥了重要作用的设备的性能。光谱仪小型化背后的动机是强大的，因为传统的光谱仪是台式仪器，它们通常太大，而且成本太高，无法移植到实验室环境之外。微机电系统（MEMS）技术与微组装相结合，提供了有前途的可能性，实现紧凑和成本效益的小型化，这样的仪器。在本文中，我们提出了一个光纤耦合傅里叶变换微型光谱仪的标称尺寸为3cmx3cmx3cm，采用3D混合微组装和目标波长在可见光和近红外光谱。我们使用模块化的微尺度部件，包括最低能量兼容MEMS紧固件来配置芯片大小的微光学工作台。光耦合、微型电子器件和电源都包含在光谱仪封装中。为了在微光学工作台上实现所需的精度，我们采用了微元件的自动化组装。我们提出了一个系统的两步组装和对准计划（粗和精）使用基于图像的斑点雅可比算法。在本文中，我们提出了详细的设计，公差分析，校准，微装配和视觉伺服技术，以及光谱数据恢复完成的原型。
Integrating optics with MEMS presents numerous challenges in assembly and joining of heterogeneous components, stringent alignment of parts, packaging of the device to protect it, etc. Microspectrometers are examples of MOEMS devices where these issues play a significant role to the performance of the device. The motivation behind miniaturization of the spectrometer is strong, because traditional spectrometers are table-top instruments, and they are generally too large, and too costly to be ported outside of lab environments. Micro-Electro-Mechanical-Systems (MEMS) technology combined with microassembly offers promising possibilities to achieve compact and cost-effective miniaturization in such instruments. In this paper, we present a fiber-coupled Fourier-Transform microspectrometer with a nominal size of 3cmx3cmx3cm, constructed using 3D hybrid microassembly and targeting wavelengths in the visible and NIR spectra. We use modular micro scale parts, including minimum energy compliant MEMS fasteners to configure a die-sized microoptical bench. Light coupling, miniature electronics and power are included in a spectrometer package. In order to achieve the required precision on the microoptical bench we employ automated assembly of microcomponents. We present a systematic two-step assembly & alignment scheme (coarse and fine) using an image-based spot Jacobian algorithm. In this paper we present details related to design, tolerance analysis, calibration, microassembly and visual servoing techniques as well as spectrum data recovery for a completed prototype.