Diffusion-related behaviour of gold in thin film systems
Diffusion-related behaviour of gold in thin film systems
复制标题
金在薄膜系统中的扩散相关行为
DOI：
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发表时间：
1979
期刊：
影响因子：
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通讯作者：
M. Pinnel
中科院分区：
文献类型：
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作者：
M. Pinnel
固态扩散过程是金薄膜系统行为的一个方面，它受到越来越多的关注，因为金层必须做得更薄而不牺牲其可靠性。本文回顾了电子行业常用的各种一层和两层贱金属系统中黄金工艺的特点。描述了许多有趣的现象并与它们可能在各种设备中引起的服务问题相关。
The process of diffusion in the solid state is one aspect of behaviour in gold thin film systems which has received increased attention as gold layers have had to be made significantly thinner without sacrificing their reliability. This article reviews the characteristics of this process for gold over the various one- and two-layer base metal systems which are in common use by the electronics industry. A number of interesting phenomena are described and related to the service problems which they may cause in various devices.