Development of polyimide flexible tactile sensor skin
Development of polyimide flexible tactile sensor skin
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DOI：
10.1088/0960-1317/13/3/302
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发表时间：
2003-05-01
影响因子：
2.3
通讯作者：
Liu, C
中科院分区：
文献类型：
--
作者：
Engel, J;Chen, J;Liu, C
我们介绍了一种基于聚酰亚胺的二维触觉传感阵列的研制，该阵列采用了一种新的倒置制造技术。对热二氧化硅或PYREX(R)基板进行处理，以使其表面被羟基封端，从而在加工过程中通过被怀疑是氢键的氢键在这种基板和纺丝聚酰亚胺薄膜之间实现良好的粘附性，当需要释放时，氢键可以选择性地断裂。通过打破这些键，可以快速释放连续的聚酰亚胺薄膜。这一过程产生了坚固耐用、低成本和连续的聚合物薄膜器件。开发的传感器皮肤包含一系列基于膜的触觉传感器(紫杉醇)。微机械薄膜金属应变计安装在聚酰亚胺薄膜的边缘。每个应变片的电阻变化是由施加在薄膜顶部的触觉凸起上的法向力引起的，用于成像力分布。对单个紫杉醇的反应进行了表征。税收的有效计量因数约为1.3。通过实验获得了传感器阵列的输出。展示的设备足够坚固，可以与人类、日常物品和污染物直接接触，而不需要过度小心。
We present the development of a polyimide-based two-dimensional tactile sensing array realized using a novel inverted fabrication technique. Thermal silicon oxide or Pyrex(R) substrates are treated such that their surfaces are OH group terminated, allowing good adhesion between such substrates and a spun-on polyimide film during processing through what are suspected to be hydrogen bonds that can be selectively broken when release is desired. The release of the continuous polyimide film is rapidly accomplished by breaking these bonds. This process results in robust, low-cost and continuous polymer-film devices. The developed sensor skin contains an array of membrane-based tactile sensors (taxels). Micromachined thin-film metal strain gauges are positioned on the edges of polyimide membranes. The change in resistance from each strain gauge resulting from normal forces applied to tactile bumps on the top of the membranes is used to image force distribution. Response of an individual taxel is characterized. The effective gauge factor of the taxels is found to be approximately 1.3. Sensor array output is experimentally obtained. The demonstrated devices are robust enough for direct contact with humans, everyday objects and contaminants without undue care.