Commissioning of surface chemistry end-station in BL23SU of SPring-8
Commissioning of surface chemistry end-station in BL23SU of SPring-8
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DOI：
10.1016/s0169-4332(00)00779-0
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发表时间：
2001-01-15
影响因子：
6.7
通讯作者：
Yoshigoe, A
中科院分区：
文献类型：
--
作者：
Teraoka, Y;Yoshigoe, A
一台用于表面反应研究的实验装置目前正在调试中，作为BL23SU软X射线光束线的终点站，将于春季8号投入使用。利用超音速分子束(SSMB)技术控制入射分子的平动能。由于差动抽运系统在分子束运转过程中保持了真空室内的低气压，从而有效地抑制了气体向束线的扩散。利用常规X射线源对硅氧化过程进行了初步实验，验证了平动能控和光电子能谱性能。当入射氧分子的平动能增加到3 eV时，化学吸附在Si(100)表面的氧原子的光电子发射强度增强。(C)2001 Elsevier Science B.V.保留所有权利。
An experimental apparatus for surface reaction research is now under commissioning as an end-station of a soft X-ray beamline, BL23SU, in the SPring-8. A supersonic molecular beam (SSMB) technique is applied to control the translational-energy of incident molecules. Owing to keeping low pressure in vacuum chambers during molecular beam operation by differential-pumping systems, the suppression of gas diffusion into the beamline was sufficiently achieved. The translational-energy control and photoemission spectroscopic performance were checked by preliminary experiments concerning the silicon oxidation using a conventional X-ray source. The photoemission intensity from chemisorbed oxygen atoms on an Si(1 0 0) surface vias enhanced with increasing the translational-energy of incident oxygen molecules up to 3 eV. (C) 2001 Elsevier Science B.V. All rights reserved.