Elasticity and Resistivity Study on the Electromigration Effects Observed in Aluminum-Silicon Copper Alloy Thin Films
Elasticity and Resistivity Study on the Electromigration Effects Observed in Aluminum-Silicon Copper Alloy Thin Films
复制标题
铝硅铜合金薄膜电迁移效应的弹性和电阻率研究
DOI:
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发表时间:
2004
期刊:
影响因子:
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通讯作者:
H.Tanimoto
中科院分区:
文献类型:
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作者:
H.Mizubayashi;D.Kashimura;K.Yokota;H.Tanimoto