High-resolution technique for fabricating environmentally sensitive hydrogel microstructures
High-resolution technique for fabricating environmentally sensitive hydrogel microstructures
复制标题
DOI：
10.1021/la048719y
复制
发表时间：
2004-10-12
期刊：
影响因子：
3.9
通讯作者：
Ziaie, B
中科院分区：
文献类型：
--
作者：
Lei, M;Gu, YD;Ziaie, B
本通讯介绍了一种新的高分辨率技术，用于制造水凝胶微结构，使用光刻胶光刻和干法蚀刻。该方法消除了传统方法中使用的光引发剂的需要，并且适用于广泛的水凝胶。该技术也与传统的微制造方法兼容，从而允许水凝胶与微电子和微机电系统微结构的集成。不同形状和大小的环境敏感的水凝胶图案化的批量规模（晶圆级）的分辨率下降到2.5微米。图案化的pH值敏感的水凝胶与微米尺寸的尺寸表现出体积响应在pH值的变化在几秒钟内。沉积的铝薄膜上的水凝胶微结构的顶部被用来制造环境敏感的独立的微镜与7 μ m/pH值在pH 5.0的垂直位移灵敏度。这些结构开启了制造基于光子的水凝胶微传感器的可能性。
This communication introduces a novel high-resolution technique for fabricating hydrogel microstructures using photoresist lithography and dry etching. This method alleviates the need for photoinitiators used in conventional approaches and is applicable to a broad range of hydrogels. This technique is also compatible with traditional microfabrication methods, thus allowing the integration of hydrogels with microelectronics and microelectromechanical system microstructures. Environmentally sensitive hydrogels of different shapes and sizes were patterned in a batch scale (wafer-level) with resolutions down to 2.5 mum. The patterned pH-sensitive hydrogels with micron-sized dimensions exhibit volume responses within seconds of change in pH. Deposited aluminum thin films on top of hydrogel microstructures were used to fabricate environmentally sensitive free-standing micromirrors with a vertical displacement sensitivity of 7 mum/pH at pH 5.0. These structures open the possibility of fabricating on-chip photonic-based hydrogel microsensors.