Propagation behavior of threading screw dislocation during off-axis PVT growth and the hybrid growth combining solution growth and PVT growth of 4H-SiC
Propagation behavior of threading screw dislocation during off-axis PVT growth and the hybrid growth combining solution growth and PVT growth of 4H-SiC
复制标题
4H-SiC离轴PVT生长以及溶液生长和PVT生长混合生长过程中螺纹螺位错的传播行为
DOI：
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发表时间：
2022
期刊：
影响因子：
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通讯作者：
加藤智久
中科院分区：
文献类型：
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作者：
江藤数馬;三谷武志;百瀬賢治;加藤智久
