Subnanosecond-laser-induced periodic surface structures on prescratched silicon substrate
Subnanosecond-laser-induced periodic surface structures on prescratched silicon substrate
复制标题
预划痕硅衬底上的亚纳秒激光诱导周期性表面结构
DOI:
10.7567/apex.9.062703
复制
发表时间:
2016
影响因子:
2.3
通讯作者:
Shigeki Matsuo
中科院分区:
文献类型:
--
作者:
Motoharu Hongo;Shigeki Matsuo