Improvement of capacitance-voltage (C-V) characteristics of YSZ/Si(001) and ZrO_2/Si thin film by Nb-doping
Improvement of capacitance-voltage (C-V) characteristics of YSZ/Si(001) and ZrO_2/Si thin film by Nb-doping
复制标题
Nb掺杂改善YSZ/Si(001)和ZrO_2/Si薄膜的电容-电压(C-V)特性
DOI:
--
复制
发表时间:
2003
期刊:
影响因子:
--
通讯作者:
N.Mizutani
中科院分区:
文献类型:
--
作者:
N.Wakiya;T.Moriya;K.Shinozaki;N.Mizutani