Hangsheng Yang: "Mass spectrometric study of low-pressure inductively coupled plasma for chemical vapor deposition of cubic boron nitride films"Sci.and tech.of adv.Mater. (In print). (2004)
Hangsheng Yang: "Mass spectrometric study of low-pressure inductively coupled plasma for chemical vapor deposition of cubic boron nitride films"Sci.and tech.of adv.Mater. (In print). (2004)
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杨航生:“低压电感耦合等离子体化学气相沉积立方氮化硼薄膜的质谱研究”材料科学与技术。
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