In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation
In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation
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DOI：
10.1016/j.matdes.2016.09.011
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发表时间：
2016-12
影响因子：
8.4
通讯作者：
G. Esteves;C. Fancher;M. Wallace;R. Johnson-Wilke;R. Wilke;S. Trolier-McKinstry;R. Polcawich;Jacob L. Jones
中科院分区：
文献类型：
--
作者：
G. Esteves;C. Fancher;M. Wallace;R. Johnson-Wilke;R. Wilke;S. Trolier-McKinstry;R. Polcawich;Jacob L. Jones
采用同步辐射X射线衍射（XRD）技术研究了500 nm锆钛酸铅（52/48，Zr/Ti）压电微机电系统（piezoMEMS）器件的电场响应特性。在厚度为3 μm的SiO2和Si 3 N4复合弹性层上，厚度为500 nm的PZT薄膜构成的悬臂梁中，观察到了90°的铁电/铁弹畴重取向.衍射数据从平行和平行于场的扇区表明存在铁弹织构，这是典型的在原位电场衍射研究的大块四相钙钛矿铁电体。通过002和200衍射曲线的强度变化来量化重新取向到场方向的域的分数。从结果计算的最大诱导体积分数为20%，这是在以前的散装和薄膜铁电衍射研究中看到的值相媲美。本工作的新奇在于，使用同步辐射XRD在外加电场的情况下对微米级尺寸（低至60，000 μm3）的完全释放的铁电薄膜器件进行了询问。此外，实验表明，90°铁电/铁弹畴重取向可以在这样的小尺寸的样品中表征。
Synchrotron X-ray diffraction (XRD) was used to probe the electric-field-induced response of a 500 nm lead zirconate titanate (52/48, Zr/Ti) (PZT) based piezoelectric microelectromechanical system (piezoMEMS) device. 90° ferroelectric/ferroelastic domain reorientation was observed in a cantilever comprised of a 500 nm thick PZT film on a 3 μm thick elastic layer composite of SiO2and Si3N4. Diffraction data from sectors both parallel- and perpendicular-to-field showed the presence of ferroelastic texture, which is typically seen inin situelectric field diffraction studies of bulk tetragonal perovskite ferroelectrics. The fraction of domains reoriented into the field direction was quantified through the intensity changes of the 002 and 200 diffraction profiles. The maximum induced volume fraction calculated from the results was 20%, which is comparable to values seen in previous bulk and thin film ferroelectric diffraction studies. The novelty of the present work is that a fully released ferroelectric thin film device of micron scale dimensions (down to 60,000 μm3) was interrogatedin situwith an applied electric field using synchrotron XRD. Furthermore, the experiment demonstrates that 90° ferroelectric/ferroelastic domain reorientation can be characterized in samples of such small dimensions.