ZnO thin film on side polished optical fiber for gas sensing applications
ZnO thin film on side polished optical fiber for gas sensing applications
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DOI：
10.1016/j.apsusc.2007.07.155
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发表时间：
2007-12
影响因子：
6.7
通讯作者：
A. Dikovska;P. Atanasov;A. Andreev;B. Zafirova;E. Karakoleva;T. R. Stoyanchov
中科院分区：
文献类型：
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作者：
A. Dikovska;P. Atanasov;A. Andreev;B. Zafirova;E. Karakoleva;T. R. Stoyanchov
在这项工作中，薄膜ZnO薄膜已被生产的脉冲激光沉积在侧面抛光光纤的光学气体传感器的应用。研究了沉积过程中衬底温度和氧气压力等工艺参数对传感元件对氨气灵敏度的影响。对于在150°C衬底温度和20 Pa氧气压力下制备的样品，在室温下观察到共振最小值的光谱位置向较长波长的偏移。NH_3浓度在500 ~ 5000 ppm时，光谱在0.16-1.13nm范围内发生变化。
In this work, thin ZnO films have been produced by pulsed laser deposition on side-polished fiber for optical gas sensor applications. The influence was investigated of the processing parameters, such as substrate temperature and oxygen pressure applied during deposition, on the sensitivity to ammonia of the sensing element. A shift of the spectral position of the resonance minimum to the longer wavelengths was observed at room temperature for the sample prepared at 150°C substrate temperature and 20Pa oxygen pressure. Spectral changes in the range 0.16–1.13nm for NH3concentrations between 500 and 5000ppm were also observed.