Characterization of suprathermal electron population in He dc glow discharges by optical emission and probe diagnostics
Characterization of suprathermal electron population in He dc glow discharges by optical emission and probe diagnostics
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通过光学发射和探针诊断表征 He 直流辉光放电中的超热电子布居
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
F. Tabarés
中科院分区：
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作者：
A. B. Mart́ın;E. Oyarzabal;F. Tabarés
在低压He直流辉光放电等离子体（3-8 mTorr）中发现了能量高达阴极落势的电子的强贡献的证据，这与电子中性非弹性碰撞的平均自由程估计的期望一致。采用一种简单的延迟场分析仪型网格探针，对He等离子体中的全电子能量分布函数（EEDF）进行了表征，其中超热电子的贡献很大（高达3.5%）。推导出的eedf与He线比诊断结果进行了交叉检查，在压力和等离子体电流的几个值上发现了良好的一致性。
Evidence of the strong contribution of electrons with energies up to the cathode fall potential was found in low-pressure He dc glow discharge plasmas (3–8 mTorr), in agreement with expectations from the estimates of the mean free path of electron–neutral inelastic collisions. A simple gridded probe, of the retarding field analyzer type, was applied to the characterization of the full electron energy distribution function (EEDF) in He plasmas with significant contribution from suprathermal electrons (up to 3.5%). The inferred EEDFs were cross-checked with results from the He line ratio diagnostic and good agreement was found at several values of pressure and plasma current.