Realization of hollow SiO2 micronozzles for electrical measurements on living cells
Realization of hollow SiO2 micronozzles for electrical measurements on living cells
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DOI：
10.1063/1.1528292
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发表时间：
2002-12-23
影响因子：
4
通讯作者：
Bischoff, U
中科院分区：
文献类型：
--
作者：
Lehnert, T;Gijs, MAM;Bischoff, U
我们提出了一种微流控装置，用于固定和电测量，如膜片钳或阻抗测量，对单个活细胞。微米大小的空洞。SiO2喷嘴采用深等离子体刻蚀工艺在硅片上实现。微喷嘴与含有微流体通道和Ag/AgCl电极的玻璃晶圆集成在一起。通过流体动力在喷嘴上获得可靠的电池定位。确定了系统的相关电气参数，特别是附加单元与喷嘴之间的密封电阻。(C) 2002年美国物理研究所。
We present a microfluidic device for the immobilization and electrical measurements, such as patch-clamp or impedance measurements, on individual living cells. Micron-sized hollow. SiO2 nozzles are realized in Si wafers using a deep plasma,etching process. The micronozzles are integrated with glass wafers containing microfluidic channels and Ag/AgCl electrodes. Reliable cell positioning on the nozzles via hydrodynamic forces is obtained. Relevant electrical parameters of the system, especially seal resistances between attached cells and the nozzle, are determined. (C) 2002 American Institute of Physics.