Precision patterning of PDMS membranes and applications
Precision patterning of PDMS membranes and applications
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DOI：
10.1088/0960-1317/18/3/037004
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发表时间：
2008-03-01
影响因子：
2.3
通讯作者：
Sun, Yu
中科院分区：
文献类型：
--
作者：
Tong, Jianhua;Simmons, Craig A.;Sun, Yu
本文提出了一种基于聚对二甲苯剥离的聚二甲基硅氧烷（PDMS）膜精密图案化方法。该方法允许构造具有高度平坦、均匀顶表面或具有受控曲率的PDMS膜。不同的工艺参数对PDMS膜的几何特性的影响进行了描述。本文还演示了应用程序的PDMS精密图案化方法的PDMS微透镜阵列，这需要弯曲的顶面，和一个3轴静电定位阶段，使用PDMS膜与平面作为粘合材料，以及一个精确定义的间隔。
This paper presents a method for precision patterning of polydimethylsiloxane ( PDMS) membranes based on parylene C lift-off. The process permits the construction of PDMS membranes either with a highly flat, uniform top surface or with a controlled curvature. Effects of varying processing parameters on the geometrical characteristics of the PDMS membranes are described. The paper also demonstrates the application of the PDMS precision patterning method to the construction of PDMS microlens arrays, which require curved top surfaces, and a 3-axis electrostatic positioning stage that uses PDMS membranes with flat surfaces as a bonding material as well as a precisely defined spacer.