Supervisory control of a rapid thermal multiprocessor
Supervisory control of a rapid thermal multiprocessor
复制标题
快速热多处理器的监控
DOI：
10.1109/9.231459
复制
发表时间：
1993
期刊：
影响因子：
--
通讯作者：
G. Franklin
中科院分区：
文献类型：
--
作者：
S. Balemi;G. Hoffmann;P. Gyugyi;H. Wong;G. Franklin
介绍了监控理论在半导体生产设备中的应用。该方法允许灵活的设计和可靠的更新工艺配方，以适应频繁变化的制造要求。给出了监督控制理论的输入输出解释。这种解释导致制造系统的通用实施方案。使用二进制决策图的合成定点算法实现，使现实规模的监督员的设计。氧化物生长配方的样品合成是在10/sup 6/ states量级的状态空间上进行的。描述了用于所调查应用的逻辑顺序控制软件的实际实施。>
An application of supervisory control theory to a piece of semiconductor manufacturing equipment is presented. The approach allows the flexible design and reliable update of processing recipes to accommodate frequently changing manufacturing requirements. An input-output interpretation of supervisory control theory is given. This interpretation leads to a generic implementation scheme for manufacturing systems. A synthesis fixpoint algorithm implementation using binary decision diagrams enables the design of supervisors of realistic size. A sample synthesis for an oxide growth recipe is performed on a state space of the order of 10/sup 6/ states. The actual implementation of the logic sequencing control software for the application under investigation is described. >