3-Dimensional profile distortion measured by stylus type surface profilometer
3-Dimensional profile distortion measured by stylus type surface profilometer
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DOI：
10.1016/j.measurement.2012.09.022
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发表时间：
2013-01-01
期刊：
影响因子：
5.6
通讯作者：
Lee, Dong-Hyeok
中科院分区：
文献类型：
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作者：
Lee, Dong-Hyeok
本文从二维和三维两个方面分析了针尖半径大小对针式表面轮廓仪测量轮廓的影响。在分析结果的基础上，提出了针尖半径的选择准则，以提高测量结果的可靠性。为此，设计并实现了一种用于二维和三维测量模拟的模拟算法，并利用原子力显微镜(AFM)在实际加工表面上获得了模拟所用的三维表面纹理，以提高模拟结果的可靠性。将模拟结果与用粗糙度测试仪对同一试件的测量结果进行了对比，验证了本文提出的模拟分析的有效性。对模拟得到的二维和三维模拟剖面进行了累积功率谱分析。在分析结果的基础上，明确了针式轮廓仪的有效频率分量场，并结合试件的表面纹理特征，提出了针尖半径的选择准则。本文的目的是提供一种简单有效的方法来替代某些工程标准，该标准规定了仅用加工表面的标称RQ来测量针尖半径的选择。爱思唯尔有限公司出版。
In this paper, the distortion effect in measured profiles caused by stylus tip radius size of stylus-typed surface profilometer was analyzed in terms of 2D and 3D. On the basis of our analysis results, we propose selection criteria for the stylus tip radius to improve the reliability of measurement results. For this purpose, a simulation algorithm has been devised and implemented for 2D and 3D measurement simulations, and the 3-dimensional surface texture used in simulation was obtained using an Atomic Force Microscope (AFM) on an actual machined surface to improve the reliability of simulation results. The simulation results are compared with the measured results from the same specimen using a roughness tester, and the validity of analysis via the simulation proposed in this study is confirmed. Cumulative power spectral analysis was performed for the 2D and 3D simulated profiles obtained from simulation. On the basis of the analysis results, an effective frequency components field using a stylus type profilometer is clarified, and the selection criteria of the stylus tip radius for measurement is proposed considering the surface texture characteristics of the specimen. The purpose of this paper is to provide a basis of a simple and effective method which could be an alternative of some engineering standard that specifies selection of stylus tip radius for the measurement using only nominal Rq for machined surface. Published by Elsevier Ltd.