Temperature sensor based on a hybrid ITO-silica resonant cavity.
Temperature sensor based on a hybrid ITO-silica resonant cavity.
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DOI：
10.1364/oe.23.001930
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发表时间：
2015-02
期刊：
影响因子：
3.8
通讯作者：
A. B. Socorro;S. Soltani;I. del Villar;J. Corres;A. Armani
中科院分区：
文献类型：
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作者：
A. B. Socorro;S. Soltani;I. del Villar;J. Corres;A. Armani
由多个材料体系组成的集成光学器件能够实现独特的性能特性，使其能够在传感和电信方面得到应用。由于易于制造，以前的大部分工作都集中在聚合物-介质或聚合物-半导体系统上。然而，聚合物的环境稳定性是有限的。在本工作中，制作了一种由二氧化硅环形谐振腔上的ITO涂层组成的混合器件。用有限元方法模拟了多材料器件中的光场，发现高折射率薄膜对光学模式的影响很大。质量因数也被测量，并且材料损失有限。此外，还对其作为温度传感器的性能进行了表征。由于ITO的高热光系数和ITO层中光场的局域化，混合温度传感器的性能比传统的二氧化硅器件提高了近3倍。
Integrated optical devices comprised of multiple material systems are able to achieve unique performance characteristics, enabling applications in sensing and in telecommunications. Due to ease of fabrication, the majority of previous work has focused on polymer-dielectric or polymer-semiconductor systems. However, the environmental stability of polymers is limited. In the present work, a hybrid device comprised of an indium tin oxide (ITO) coating on a silicon dioxide toroidal resonant cavity is fabricated. Finite element method simulations of the optical field in the multi-material device are performed, and the optical mode profile is significantly altered by the high index film. The quality factor is also measured and is material loss limited. Additionally, its performance as a temperature sensor is characterized. Due to the high thermo-optic coefficient of ITO and the localization of the optical field in the ITO layer, the hybrid temperature sensor demonstrates a nearly 3-fold improvement in performance over the conventional silica device.