Plasma based nitrogen ion implantation to hydrogenated diamond-like carbon films-猫眼课题宝

DOI：

10.1016/j.nimb.2018.08.009

发表时间：

2018-10

期刊：

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

影响因子：

通讯作者：

中科院分区：

其他

文献类型：

作者：

T. Kimura;Hidekazu Yanai;S. Nakao;K. Azuma

Plasma based nitrogen ion implantation to hydrogenated diamond-like carbon films