Surface micromachined electrostatically actuated micro peristaltic pump
Surface micromachined electrostatically actuated micro peristaltic pump
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DOI：
10.1039/b403906h
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发表时间：
2004-01-01
期刊：
影响因子：
6.1
通讯作者：
Tai, YC
中科院分区：
文献类型：
--
作者：
Xie, J;Shih, J;Tai, YC
报道了一种静电驱动的微型蠕动泵。该微型泵完全采用多层聚对二甲苯技术进行表面微机械加工。利用多层技术，微型泵设计使泵送流体与电场隔离。演示了使用直流和交流电压对聚对二甲苯膜进行静电驱动，并将其应用于基于三相蠕动序列的流体泵送。在 20 Hz 相频下实现了 1.7 nL min(-1) 的最大流量和 1.6 kPa 的估计泵压。还使用蠕动泵的集总参数模型进行了动态分析。分析结果可以定量了解蠕动泵操作，并正确预测实验数据所表现的趋势。微型泵占地面积小，非常适合微流体的大规模集成。此外，由于相同的平台技术也被用于制造其他设备（例如阀门、电喷雾电离喷嘴、过滤器和流量传感器），因此这些不同设备的集成可能会导致多功能和功能性的微全分析系统（muTAS）。
An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied to fluid pumping based on a 3-phase peristaltic sequence. A maximum flow rate of 1.7 nL min(-1) and an estimated pumping pressure of 1.6 kPa were achieved at 20 Hz phase frequency. A dynamic analysis was also performed with a lumped-parameter model for the peristaltic pump. The analysis results allow a quantitative understanding of the peristaltic pumping operation, and correctly predict the trends exhibited by the experimental data. The small footprint of the micro pump is well suited for large-scale integration of microfluidics. Moreover, because the same platform technology has also been used to fabricate other devices (e.g. valves, electrospray ionization nozzles, filters and flow sensors), the integration of these different devices can potentially lead to versatile and functional micro total analysis systems (muTAS).