Fabrication and characterization of carbon/oxygen-implanted waveguides in Nd3+-doped phosphate glasses
Fabrication and characterization of carbon/oxygen-implanted waveguides in Nd3+-doped phosphate glasses
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DOI：
10.1117/1.oe.54.6.067106
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发表时间：
2015-06
影响因子：
1.3
通讯作者：
Chun-Xiao Liu;Jun Xu;Lili Fu;R. Zheng;Zhiguang Zhou;Wei-nan Li;Haitao Guo;She-bao Lin; Wei
中科院分区：
文献类型：
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作者：
Chun-Xiao Liu;Jun Xu;Lili Fu;R. Zheng;Zhiguang Zhou;Wei-nan Li;Haitao Guo;She-bao Lin; Wei
抽象。采用能量为6.0 MeV的碳离子注入和能量为6.0 × 1014 ions/cm ~ 2的氧离子注入，分别在掺钕磷酸盐玻璃中制备了平面光波导。用2010型棱镜耦合器测量了导模和相应的有效折射率。根据离子在物质中的阻挡和射程以及RCM反射率计算方法，分析了波导的折射率分布。近场光强分布分别采用端面耦合法和有限差分光束传播法进行了测量和模拟。对注碳波导和注氧波导的光学特性进行了比较。微发光和拉曼光谱的研究表明，Nd 3+离子的荧光特性和玻璃的微结构在波导区得到了很好的保持，这表明碳/氧注入波导是一个很好的集成光子器件的候选者。
Abstract. Optical planar waveguides in Nd3+-doped phosphate glasses are fabricated by a 6.0-MeV carbon ion implantation with a dose of 6.0×1014 ions/cm2 and a 6.0-MeV oxygen ion implantation at a fluence of 6.0×1014 ions/cm2, respectively. The guided modes and the corresponding effective refractive indices were measured by a modal 2010 prism coupler. The refractive index profiles of the waveguides were analyzed based on the stopping and range of ions in matter and the RCM reflectivity calculation method. The near-field light intensity distributions were measured and simulated by an end-face coupling method and a finite-difference beam propagation method, respectively. The comparison of optical properties between the carbon-implanted waveguide and the oxygen-implanted waveguide was carried out. The microluminescence and Raman spectroscopy investigations reveal that fluorescent properties of Nd3+ ions and glass microstructure are well preserved in the waveguide region, which suggests that the carbon/oxygen-implanted waveguide is a good candidate for integrated photonic devices.