Development of reference materials for the investigation of local mechanical properties at the nanoscale
Development of reference materials for the investigation of local mechanical properties at the nanoscale
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开发用于研究纳米尺度局部机械性能的参考材料
DOI：
10.1002/sia.4850
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
V. Buršíková
中科院分区：
文献类型：
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作者：
A. C. Campbell;P. Klapetek;M. Valtr;V. Buršíková
目前，不仅可以测量宏观物体的局部力学性能，还可以测量尺寸仅为几十纳米的纳米物体和薄膜的局部力学性能。为此，可以使用特殊的压痕装置。在过去的几十年中，许多特殊的数据测量和处理方法的薄膜表征已经发展。此外，该方法不再局限于材料科学，但现在也有广泛的应用程序的生物问题，其中的硬度/模量值是完全不同的材料科学的方法最初设计的。计量领域的数据解释并不那么简单，在处理定量结果时需要小心，特别是在处理非常软的样品时。因此，有必要使用参比样品，以便能够比较不同的仪器和验证所采用的方法。在这方面的贡献，我们提出了我们的努力，准备和测试薄膜为基础的参考材料制备等离子体技术的结果。我们描述了一种沉积程序，使我们能够生产具有大范围硬度和模量值的样品。从这些样品中，我们选择了一个非常柔软但稳定的样品，然后进一步测试，以验证其作为参考样品的适用性。本文讨论的主要问题是沉积过程的可重复性、时间稳定性和均匀性。版权所有© 2012约翰威利父子有限公司.
At present, local mechanical properties can be measured not only for macroscopic objects but also for nano‐objects and thin films with dimensions of only a few tens of nanometers. For these purposes, special indentation devices can be used. In past decades, many special data measurement and processing methods for thin film characterization have been developed. In addition, the method is no longer restricted to materials science but now also has a wide range of applications for biological problems in which the hardness/modulus values are quite different from those in materials science for which the method was originally designed. Data interpretation in the field of metrology is not so straightforward and care is required in dealing with quantitative results, especially if dealing with very soft samples. Therefore, it is necessary to use reference samples that would enable the comparison of different instruments and the validation of the applied methods. In this contribution, we present the results of our effort on preparing and testing thin film–based reference materials prepared using plasma technologies. We describe a deposition procedure that allows us to produce samples with a large range of hardness and modulus values. From these, we choose a very soft but stable sample that is then further tested to verify its suitability as a reference sample. The major issues discussed in this article are the repeatability of the deposition process, time stability, and homogeneity. Copyright © 2012 John Wiley & Sons, Ltd.