Bulk micromachined energy harvesters employing (K, Na)NbO3 thin film
Bulk micromachined energy harvesters employing (K, Na)NbO3 thin film
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采用 (K, Na)NbO3 薄膜的体量微机械能量采集器
DOI：
10.1088/0960-1317/23/3/035029
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发表时间：
2013
影响因子：
2.3
通讯作者：
H. Kuwano
中科院分区：
文献类型：
--
作者：
L. Minh;M. Hara;F. Horikiri;K. Shibata;T. Mishima;H. Kuwano
本文报道了一种采用无铅（K，Na）NbO₃（KNN）薄膜的微机械能量采集器。KNN是无铅压电材料之一，是Pb（Zr，Ti）O₃（PZT）的一种有前景的替代品。在微机械能量采集器中，在集成有质量块的硅悬臂梁上沉积了一层2μm厚的KNN薄膜。在加速度为10 m/s²、共振频率为1509 Hz时，该能量采集器实现了731 nW的输出功率和2.29 μW（g⁻²mm⁻³）的归一化功率密度。通过体微机械加工，采集到的能量显著提高，可与基于PZT的能量采集器相媲美。
In this paper, a micromachined energy harvester employing a lead-free (K, Na)NbO3 (KNN) thin film was reported. KNN is one of the lead-free piezoelectric materials. It is a promising alternative to Pb(Zr, Ti)O3 (PZT). In a micromachined energy harvester, a 2 µm thick KNN film was deposited on a silicon cantilever integrated with a proof mass. The energy harvester achieved an output power of 731 nW and a normalized power density (NPD) of 2.29 μW (g−2 mm−3) at the resonant frequency of 1509 Hz with the acceleration of 10 m s−2. The harvested energy was enhanced considerably by applying bulk micromachining, and was comparable to the PZT-based energy harvesters.