Operation of ultrasonic motor in ultrahigh vacuum condition
Operation of ultrasonic motor in ultrahigh vacuum condition
复制标题
超声电机在超高真空条件下的运行
DOI：
10.1109/ultsym.2003.1293475
复制
发表时间：
2003
期刊：
影响因子：
--
通讯作者：
Y. Endo
中科院分区：
文献类型：
--
作者：
T. Niino;S. Takahashi;Y. Endo
Aiming development of ultrahigh vacuum (UHV) compatible and fully nonmagnetic actuator, the authors are researching operation of a mode rotation type ultrasonic motor in UHV. Previously, a prototype that can generates rotation at a speed of 150rpm maintaining the gas pressure of the chamber at 3/spl times/10/sup -6/Pa was reported. In this paper, previously used plastic coating on its rotor surface is replaced with well finished zirconia ceramic to reduce gas emission from the surface. As a result, the gas pressure of the chamber during motor operation is reduced to UHV grade of 3/spl times/10/sup -7/Pa. In addition, effects of modifying stator-rotor interface shape, rotation speed and loaded torque are investigated.
