A study on the machining of high-aspect ratio micro-structures using micro-EDM
A study on the machining of high-aspect ratio micro-structures using micro-EDM
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DOI：
10.1016/s0924-0136(03)00760-x
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发表时间：
2003-09-22
影响因子：
6.3
通讯作者：
Lee, MKE
中科院分区：
文献类型：
--
作者：
Lim, HS;Wong, YS;Lee, MKE
微细电火花加工（micro-EDM或mu-EDM）作为一种新型的微细结构加工方法，正日益受到人们的青睐。微细电火花加工方法的主要优点是它的低设置成本，高精度和大的设计自由度。与蚀刻或沉积技术相比，微细电火花加工具有能够制造具有高深宽比的复杂三维形状的优点。然而，有许多操作参数影响微细电火花加工过程。在机床上制作微电极也是消除装夹误差以保持加工微结构高精度的重要工艺。本文将微结构的加工分为两个基本过程。一种是高深宽比微细电极的在机加工，另一种是微米级工件的电火花加工。研制了一种光学传感器，用于在工具制造过程中测量和控制薄电极的尺寸。已经研究了不同的方法来将薄电极制造成所需的尺寸而没有偏转。的微细电火花加工过程的性能进行了评价方面的材料去除率（MRR），刀具磨损率（TWR），和加工的稳定性。讨论了微细电火花加工过程中工作电压、间隙控制算法、R-C火花控制电路中电阻和电容值等参数对加工结果的影响。(C)2003 Elsevier B. V.保留所有权利。
Micro-electro-discharge machining (micro-EDM or mu-EDM) has been gaining popularity as a new alternative method to fabricate micro-structures. The main advantages of the micro-EDM method are its low set-up cost, high accuracy and large design freedom. Compared to etching or deposition techniques, micro-EDM has the advantage of being able to fabricate complex three-dimensional shapes with high-aspect ratio. However, there are many operating parameters that affect the micro-EDM process. The fabrication of micro-electrodes on the machine is also an important process to remove the clamping error to maintain high accuracy in the machined micro-structures.In this paper, the machining of micro-structures is divided into two basic processes. One is the on-machine fabrication of the micro-electrodes with high-aspect ratio, and the other is the EDM of the workpiece in micrometer range. An optical sensor has been developed to measure and control the dimension of the thin electrode during the tool fabrication process. Different methods have been investigated to fabricate a thin electrode into the desired dimension without deflection. The performance of the micro-EDM process is evaluated in terms of the material removal rate (MRR), tool wear ratio (TWR), and the stability of the machining. Influences of the various operating parameters of the micro-EDM process, such as the operating voltage, gap control algorithm, and resistance and capacitance values in the R-C spark control circuit, are discussed. (C) 2003 Elsevier B.V. All rights reserved.