Synthesis of alkaline‐developable, photosensitive hyperbranched polyimides through the reaction of carboxylic acid dianhydrides and trisamines
Synthesis of alkaline‐developable, photosensitive hyperbranched polyimides through the reaction of carboxylic acid dianhydrides and trisamines
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DOI：
10.1002/pola.20239
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发表时间：
2004-08
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影响因子：
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通讯作者：
Shohei Makita;Hiroto Kudo;T. Nishikubo
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文献类型：
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作者：
Shohei Makita;Hiroto Kudo;T. Nishikubo
通过三[4-（4-氨基苯氧基）苯基]乙烷（TAPE）与羧酸二酐反应，合成了具有高玻璃化转变温度和优异热稳定性的超支化聚酰亚胺（HBPI）。特别是通过TAPE与3，3 '，4，4'-二苯砜四甲酸二酐（DSDA）反应制备的超支化聚酰亚胺HBPI（TAPE-DSDA）显示出更高的热稳定性和良好的溶解性。在N-甲基-2-吡咯烷酮（NMP）中，HBPI（TAPE-DSDA）与甲基丙烯酸缩水甘油酯在四丁基溴化铵催化下反应，再与顺式-1，2，3，6-四氢邻苯二甲酸酐在三苯基膦催化下进行加成反应，制得碱显影光敏HBPI（TAPE-DSDA）-MA-CA。HBPI（TAPE-DSDA）-MA-CA的玻璃化转变温度大于300 °C。由74重量% HBPI（TAPE-DSDA）-MA-CA、22.2重量%三甲基丙烷三丙烯酸酯和3.8重量%作为光引发剂的Irgacure 907组成的抗蚀剂通过UV照射（1000 mJ/cm 2）实现了55 μm线图案和275 μm间隔图案的分辨率。
Hyperbranched polyimides (HBPI)s with high glass-transition temperatures and excellent thermal stability were synthesized through the reaction of commercially available carboxylic acid dianhydrides with tris[4-(4-aminophenoxy)phe-nyl]ethane (TAPE). In particular, hyperbranched polyimide HBPI(TAPE-DSDA), prepared through the reaction of TAPE with 3,3',4,4'-diphenylsulfonetetracarboxylic dianhydride (DSDA), showed higher thermal stability and good solubility. Furthermore, alkaline-developable, photosensitive HBPI(TAPE-DSDA)-MA-CA was prepared through the reaction of HBPI(TAPE-DSDA) with glycidyl methacrylate with tetrabutylammonium bromide as a catalyst in N-methyl-2-pyrrolidinone (NMP) followed by the addition reaction of cis-1,2,3,6-tetrahydrophthalic anhydride with triphenylphosphine as a catalyst in NMP. The glass-transition temperatures of HBPI(TAPE-DSDA)-MA-CA were greater than 300 °C. A resist composed of 74 wt % HBPI(TAPE-DSDA)-MA-CA, 22.2 wt % trimethylpropane triacrylate, and 3.8 wt % Irgacure 907 as a photoinitiator achieved a resolution of a 55-μm line pattern and a 275-μm space pattern by UV irradiation (1000 mJ/cm 2 ).