Fabrication of Micro-Pyramidal Probe Array with Aperture for Near-Field Optical Memory Applications
Fabrication of Micro-Pyramidal Probe Array with Aperture for Near-Field Optical Memory Applications
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DOI：
10.1143/jjap.39.1538
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发表时间：
2000-03
影响因子：
1.5
通讯作者：
Young-Joo Kim;K. Kurihara;Kazuhiro Suzuki;M. Nomura;S. Mitsugi;M. Chiba;K. Goto
中科院分区：
文献类型：
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作者：
Young-Joo Kim;K. Kurihara;Kazuhiro Suzuki;M. Nomura;S. Mitsugi;M. Chiba;K. Goto
在即将到来的多媒体时代，迫切需要一种新的光存储系统来实现高存储容量和高数据传输速率。为了克服远场技术的电流容量障碍，提出了一种新型的近场倏逝波光存储器，该存储器采用垂直腔面发射激光器（VCSEL）探针阵列作为光源，微锥探针阵列作为倏逝波出口。本研究针对孔径探针阵列进行设计与制作。使用微加工工艺，包括光刻、硅湿法蚀刻、热氧化和薄膜沉积，成功地制备了多达10 000片的阵列。阵列中的金字塔形探针在尺寸上几乎没有变化，并且足够尖锐以应用于近场记录头。探针尖端具有100 nm的小尺寸，并且孔径具有约150 nm的直径。更小的孔径可以通过更仔细地控制实验过程来制造，包括蚀刻工艺和热湿氧化。
A new optical memory system is urgently required to realize high memory capacity and fast data transfer rates in the coming multimedia era. To overcome the current capacity barrier of far-field techniques, a novel near-field optical memory of evanescent wave has been proposed using a vertical cavity surface emitting laser (VCSEL) probe array, consisting of the VCSEL array as a light source and the micro-pyramidal probe array as an evanescent wave exit. The design and fabrication for the aperture probe array were developed in this research. An array of up to 10,000 pieces was prepared successfully using microfabrication processes, including photolithography, silicon wet etching, thermal oxidation and thin film deposition. The pyramidal probes in the array show little variation in size and are sufficiently sharp to apply to the near-field recording head. The probe tip has a small size of 100 nm and the aperture has a diameter of around 150 nm. A smaller aperture can be fabricated with more careful control of the experimental procedures, including the etching process and thermal wet oxidation.