Development of a dielectric-barrier discharge enhanced microplasma jet
Development of a dielectric-barrier discharge enhanced microplasma jet
复制标题
DOI：
10.1063/1.3130183
复制
发表时间：
2009-05
影响因子：
4
通讯作者：
S. Kiriu;H. Miyazoe;Fumitoshi Takamine;Masaki Sai;J. Choi;T. Tomai;K. Terashima
中科院分区：
文献类型：
--
作者：
S. Kiriu;H. Miyazoe;Fumitoshi Takamine;Masaki Sai;J. Choi;T. Tomai;K. Terashima
为了在内径小于1.0 mm的石英微细毛细管中实现低温高密度等离子体，研制了一种超低功率超高频驱动的介质阻挡放电（DBD）电感耦合微等离子体源。产生了稳定的等离子体，其可持续性与气体流速无关。该等离子体射流比热电子增强的微等离子体射流具有更长的羽流，并且时间分辨特性表明ICMP和DBD射流之间存在相互作用。通过发射光谱表征，毛细管内的气体温度和电子密度分别为400-1000 K和1013-1014 cm−3。
A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated and its sustainability was independent of the gas flow rate. This plasma jet had a longer plume than that of a thermoelectron-enhanced microplasma jet, and time-resolved characterization suggested interactions between ICMP and DBD jets. By optical emission spectroscopy characterization, the gas temperature and electron density inside a capillary were estimated to be 400–1000 K and 1013–1014 cm−3, respectively.