Design, Simulation and Fabrication of Triaxial MEMS High Shock Accelerometer
Design, Simulation and Fabrication of Triaxial MEMS High Shock Accelerometer
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三轴 MEMS 高冲击加速度计的设计、仿真和制造
DOI：
10.1166/jnn.2015.9645
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发表时间：
2015
影响因子：
--
通讯作者：
Shen Yajing
中科院分区：
文献类型：
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作者：
Zhang Zhenhai;Shi Zhiguo;Yang Zhan;Xie Zhihong;Zhang Donghong;Cai De;Li Kejie;Shen Yajing
在分析其他结构加速度计缺点的基础上，提出了三轴高g MEMS压阻式加速度计，以便应用于高冲击测试领域。详细讨论了加速度计的结构和工作原理。仿真结果表明，三轴高冲击MEMS加速度计能够承受高冲击。在高冲击射击试验中，三轴高冲击MEMS加速度计在承受高冲击冲击后，能够获得侵穿过程的完整测量信息，在高冲击载荷范围内仍能保证测量精度的准确性，因此不仅可以分析弹体侵穿过程的应力波传播规律和侵穿规律，还可以提供爆点控制的测试技术。加速度计在记录弹丸侵彻硬目标的典型数据方面有着广泛的应用，为侵彻规律和防御工程提供了技术保障。
On the basis of analyzing the disadvantage of other structural accelerometer, three-axis high g MEMS piezoresistive accelerometer was put forward in order to apply to the high-shock test field. The accelerometer's structure and working principle were discussed in details. The simulation results show that three-axis high shock MEMS accelerometer can bear high shock. After bearing high shock impact in high-shock shooting test, three-axis high shock MEMS accelerometer can obtain the intact metrical information of the penetration process and still guarantee the accurate precision of measurement in high shock load range, so we can not only analyze the law of stress wave spreading and the penetration rule of the penetration process of the body of the missile, but also furnish the testing technology of the burst point controlling. The accelerometer has far-ranging application in recording the typical data that projectile penetrating hard target and furnish both technology guarantees for penetration rule and defend engineering.