Liquid Phase Electron-Beam-Induced Deposition on Bulk Substrates Using Environmental Scanning Electron Microscopy
Liquid Phase Electron-Beam-Induced Deposition on Bulk Substrates Using Environmental Scanning Electron Microscopy
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DOI：
10.1017/s1431927614000117
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发表时间：
2014-04-01
影响因子：
2.8
通讯作者：
Hastings, Jeffrey Todd
中科院分区：
文献类型：
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作者：
Bresin, Matthew;Botman, Aurelien;Hastings, Jeffrey Todd
将气体（例如水蒸气）引入环境扫描电子显微镜中是辅助绝缘或生物材料成像的常见做法。然而，这种能力也可用于引入或形成用于电子束诱导沉积的液相前体。在这项工作中，作者报告的银（Ag）和铜（Cu）结构的沉积使用两种不同的无细胞原位沉积方法，第一涉及的固体前体的原位水合和第二涉及的液滴的插入使用毛细管式液体注射系统。关键的是，包括表面活性剂显示，大大提高图案复制，而不降低金属沉积物的纯度。估计表面活性剂将液滴接触角减小到低于10度。
The introduction of gases, such as water vapor, into an environmental scanning electron microscope is common practice to assist in the imaging of insulating or biological materials. However, this capability may also be exploited to introduce, or form, liquid phase precursors for electron-beam-induced deposition. In this work, the authors report the deposition of silver (Ag) and copper (Cu) structures using two different cell-less in situ deposition methodsthe first involving the in situ hydration of solid precursors and the second involving the insertion of liquid droplets using a capillary style liquid injection system. Critically, the inclusion of surfactants is shown to drastically improve pattern replication without diminishing the purity of the metal deposits. Surfactants are estimated to reduce the droplet contact angle to below similar to 10 degrees.