Selective growth of znic oxide nanowires on the metal electrodes
Selective growth of znic oxide nanowires on the metal electrodes
复制标题
金属电极上氧化锌纳米线的选择性生长
DOI：
10.1007/s10832-006-4986-4
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发表时间：
2006
影响因子：
1.7
通讯作者：
Jae
中科院分区：
文献类型：
--
作者：
Youngjin Choi;J. Park;Jae
虽然纳米线由于其迷人的特性而成为众多研究的热门课题，但其与半导体技术的工业方面的兼容性应被考虑以获得进一步的进展。在这方面，在半导体工业的典型电极上选择性生长纳米线将是向前迈出的一步。在本研究中，我们研究了氧化锌纳米线在几种电极上所需位置的生长和排列。作为典型的电极材料，考虑铝、钛和铂。为了在Al、Ti和Pt电极的选择性区域上图案化生长ZnO纳米线，在电极的期望位置上沉积Au催化层，并且彻底检查纳米线可以仅在图案化催化层存在的地方生长的优化处理条件。
Although nanowires have been attractive subject of numerous researches due to their fascinating features, their compatibilities with industrial aspects of semiconductor technology should be considered for further progress. In this regard, the selective growth of nanowires on typical electrodes of semiconductor industry would be a step forward. In this study, we studied growth and alignment of ZnO nanowires on the desired position on several kinds of electrodes. As typical electrode materials aluminum, titanium, and platinum were considered. For patterned growth of ZnO nanowires on the selective area of Al, Ti, and Pt electrodes, Au catalytic layer was deposited on the desired position of the electrodes and the optimized processing conditions that the nanowires could be grown only where the patterned catalytic layer present were thoroughly examined.