Microfabrication on a curved surface using 3D microlens array projection
Microfabrication on a curved surface using 3D microlens array projection
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DOI：
10.1088/0960-1317/19/10/105010
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发表时间：
2009-10
影响因子：
2.3
通讯作者：
Lei Li;A. Yi
中科院分区：
文献类型：
--
作者：
Lei Li;A. Yi
在硅或其他衬底上的精确三维微结构对于光学、电子、生物医学和医学应用变得越来越重要。基于洁净室光刻和干法或湿法蚀刻工艺的传统微制造工艺基本上是二维方法。在过去，设计复杂的程序来创建一些三维微结构，然而，这些过程主要用于使用体硅加工技术在平面硅晶片衬底上创建特征。本文提出了一种基于微透镜投影技术的微加工工艺。拟议的微加工系统将具有典型的传统微加工工艺的能力，加上独特的真正的三维复制功能的基础上创建一个陡峭的弯曲基板上的微透镜。这些微透镜被精确地制造，在弯曲表面上具有特定图案，该特定图案可用于在预定义的非平面基板上创建微结构，在该基板上旋涂一层光致抗蚀剂。在适当的曝光和显影之后，在光致抗蚀剂层上产生期望的微图案。这些微特征最终可以通过湿法或干法蚀刻工艺复制在衬底上。结果表明，所制作的三维微透镜阵列具有很高的尺寸精度，整个面形误差小于6 μm。
Accurate three-dimensional microstructures on silicon or other substrates are becoming increasingly important for optical, electronic, biomedical and medical applications. Traditional microfabrication processes based on cleanroom lithography and dry or wet etching processes are essentially two-dimensional methods. In the past, complicated procedures were designed to create some three-dimensional microstructures; however, these processes were mainly used to create features on planar silicon wafer substrates using the bulk silicon machining technique. In a major departure from previous micromachining processes, a microfabrication process based on microlens projection is presented in this paper. The proposed microfabrication system will have the capabilities of a typical conventional micromachining process plus the unique true three-dimensional replication features based on microlenses that were created on a steep curved substrate. These microlenses were precisely fabricated with a specific pattern on the curved surface that can be used to create microstructures on a pre-defined nonplanar substrate where a layer of photoresist was spin coated. After proper exposure and development, the desired micro patterns are created on the photoresist layer. These micro features can eventually be replicated on the substrate via wet or dry etching processes. The results show that the fabricated three-dimensional microlens array has very high dimensional accuracy and the profile error is less than 6 µm over the entire surface.