Imaging artefacts in atomic force microscopy with carbon nanotube tips
Imaging artefacts in atomic force microscopy with carbon nanotube tips
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DOI：
10.1088/0957-4484/16/11/003
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发表时间：
2005-11-01
期刊：
影响因子：
3.5
通讯作者：
Nguyen, CV
中科院分区：
文献类型：
--
作者：
Strus, MC;Raman, A;Nguyen, CV
带有碳纳米管尖端的动态原子力显微镜（Dynamic atomic force microscopy，动态原子力显微镜）被认为是对半导体表面关键尺寸特征进行高精度纳米测量的有力工具。我们研究了多壁碳纳米管（多壁碳纳米管）尖端与高纵横比结构相互作用的振荡AFM微悬臂梁在动态AM的吸引状态下的性能。我们给出了SiO2光栅和钨纳米棒的实验结果，显示了两种不同的成像伪影，即凹坑的堡状和大环形伪影，这是碳纳米管AFM探针操作所固有的。通过对操作参数的细致调整，定性地描述并解释了这些工件与碳纳米管弯曲、粘附和粘附之间的联系。
Dynamic atomic force microscopy (dynamic AFM) with carbon nanotube tips has been suggested as an enabling tool for high precision nanometrology of critical dimension features of semiconductor surfaces. We investigate the performance of oscillating AFM microcantilevers with multi-walled carbon nanotube (multi-walled CNT) tips interacting with high aspect ratio structures while in the attractive regime of dynamic AM We present experimental results on SiO2 gratings and tungsten nanorods, which show two distinct imaging artefacts, namely the fort-nation of divots and large ringing artefacts that are inherent to CNT AFM probe operation. Through meticulous adjustment of operating parameters, the connection of these artefacts to CNT bending, adhesion, and stiction is described qualitatively and explained.