Highly Sensitive and Wide Linear-Response Pressure Sensors Featuring Zero Standby Power Consumption under Bending Conditions
Highly Sensitive and Wide Linear-Response Pressure Sensors Featuring Zero Standby Power Consumption under Bending Conditions
复制标题
高灵敏度、宽线性响应压力传感器在弯曲条件下具有零待机功耗
DOI：
10.1021/acsami.0c02774
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发表时间：
2020
影响因子：
9.5
通讯作者：
Chen Ming
中科院分区：
文献类型：
--
作者：
Yi Chenghan;Hou Yuxin;He Ke;Li Weimin;Li Nianci;Wang Zhongguo;Yang Bing;Xu Shuda;Wang Heng;Gao Chuanzeng;Wang Zhengyan;Gu Guoqiang;Wang Zhixun;Wei Lei;Yang Chunlei;Chen Ming
灵活的压力传感器在待机模式下具有零功耗、高灵敏度和宽线性响应范围的能力在真正基于灵活矩阵的场景中至关重要。然而，当传统的柔性压力传感器安装在曲面上时，由于法向应力的作用，会产生伪信号响应，导致线性响应范围较短。介绍了一种高性能、零待机功耗的柔性压阻式压力传感器。柔性压力传感器是由聚二甲基硅氧烷(PDMS)/炭黑(CB)、图案化聚酰亚胺(PI)隔离层和激光诱导石墨烯(LIG)叉指电极制成的。由于PDMS/CB和LIG叉指电极的分层结构和足够的粗糙度，所提出的压力传感器(PDMS/CB/PI/LIG)具有高灵敏度(43kPa-1)、大的线性响应范围(0.4-13.6kpa)、快速响应(<；40ms)和长期循环稳定性(>；1800个循环)。在某些弯曲条件下(弯曲角度：0-5o)，压力传感器还具有零待机功耗的优点。此外，还从实验和理论上研究了PI隔离层的孔径对压力传感器性能的影响。作为概念的证明，一种受生物启发的人造触觉神经元系统已经成功地装备成调制发光二极管灯的数量。所提出的高性能压力传感器在柔性和可穿戴电子设备中具有广阔的应用前景，特别是在实际的基于柔性矩阵的场景中的应用。
The ability of a flexible pressure sensor to possess zero power consumption in standby mode, high sensitivity, and wide linear-response range is critical in real flexible matrix-based scenes. However, when the conventional flexible pressure sensors are attached on a curved surface, a pseudosignal response is generated because of the normal stress, resulting in a short linear-response range. Here, a flexible piezoresistive pressure sensor with high performance, zero standby power consumption is demonstrated. The flexible pressure sensor is fabricated from polydimethylsiloxane (PDMS)/carbon black (CB), patterned polyimide (PI) spacer layer, and laser-induced graphene (LIG) interdigital electrodes. Benefiting from the hierarchical structure and sufficient roughness of PDMS/CB and LIG interdigital electrodes, the proposed pressure sensors (PDMS/CB/PI/LIG) exhibit high sensitivity (43 kPa–1), large linear-response range (0.4–13.6 kPa), fast response (<40 ms), and long-term cycle stability (>1800 cycles). The resulting pressure sensor also features zero standby power consumption merit under certain bending conditions (bending angle: 0–5o). Furthermore, the effect of the hole diameter of the PI spacer layer on the performance of the pressure sensors is experimentally and theoretically investigated. As a proof of concept, a bioinspired artificial haptic neuron system has been successfully equipped to modulate the number of lit LED lights. The proposed high-performance pressure sensor has promising potential to be used in flexible and wearable electronics, especially for the applications in actual flexible matrix-based scenes.