Hybrid physics-guided data-driven modeling for generalizable geometric accuracy prediction and improvement in two-photon lithography
Hybrid physics-guided data-driven modeling for generalizable geometric accuracy prediction and improvement in two-photon lithography
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DOI：
10.1016/j.jmapro.2023.12.024
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发表时间：
2024-01
影响因子：
6.2
通讯作者：
Sixian Jia;Jieliyue Sun;Andrew Howes;Michelle Dawson;K. Toussaint;Chenhui Shao
中科院分区：
文献类型：
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作者：
Sixian Jia;Jieliyue Sun;Andrew Howes;Michelle Dawson;K. Toussaint;Chenhui Shao
