Variable width based stepped MEMS cantilevers for micro or pico level biosensing and effective switching
Variable width based stepped MEMS cantilevers for micro or pico level biosensing and effective switching
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DOI：
10.1007/s12206-015-1029-6
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发表时间：
2015-12
影响因子：
1.6
通讯作者：
D. K. Parsediya;Jawar Singh;P. K. Kankar
中科院分区：
文献类型：
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作者：
D. K. Parsediya;Jawar Singh;P. K. Kankar
微悬臂梁在生物传感中具有很高的性能和灵敏度，需要在极低的分析物粘附范围内精确测量尖端挠度。基于恒定几何的矩形微悬臂梁不足以用于微或皮水平甘油三酯（TG）和葡萄糖检测。在相同的表面积、长度和厚度下，基于变宽度的阶梯微悬臂梁在相同的TG和葡萄糖分子压力下表现出近两倍或三倍的尖端挠度。该开关具有较低的拉入电压要求，可用于射频可重构天线，改变其工作频率和辐射特性。为了找到具有较好挠度灵敏度的微悬臂梁的最优设计，对几种微悬臂梁的构型进行了研究和分析。本文还建立了单阶梯和双阶梯微悬臂梁的数学模型，与仿真结果吻合较好。
High performance and sensitivity of a microcantilever beam is much demanded in biosensing and needs accurate measurement of tip deflection under very low range of analyte adhesion. Constant geometry based rectangular microcantilevers are not good enough for micro or pico level triglyceride (TG) and glucose detection. With the same surface area, length and thickness, the proposed variable width based stepped microcantilever beams exhibit nearly twice or thrice more tip deflection corresponding to the same TG and glucose molecular pressure. With the less pull-in voltage requirement, such proposed stepped microcantilever beam based switches can be utilized in RF reconfigurable antenna for altering its operating frequency and radiation properties. Several configurations of proposed microcantilevers have been studied and analyzed for finding the optimal design with better deflection sensitivity. This paper also encompasses the mathematical modeling of proposed single and double stepped microcantilever beam, which exhibits good agreement with the simulation.