Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region
Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region
复制标题
极紫外和软X射线区域多层镜研究的实验室方法
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
S. Zuev
中科院分区：
文献类型：
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作者：
M. S. Bibishkin;D. P. Chekhonadskih;N. Chkhalo;E. B. Kluyenkov;A. Pestov;N. Salashchenko;L. Shmaenok;I. G. Zabrodin;S. Zuev
本文报道了IPM RAS中两种反射计的研制。一个使调查的角度和光谱特性的反射镜与任何形状的反射表面在0.6-20 nm的光谱范围。另一个是专门设计来研究EUV光源对反射镜反射特性的影响，可以测试平面样品。由于高孔径比（立体角为0.034球面度），高反射系数的镜子，强大的无窗X射线管，和有效的检测器，反射计提供了一个分辨率的反射系数的变化在0.1%的水平。
In the paper, we report development of two reflectometers in IPM RAS. One enables investigation of the angular and spectral characteristics of mirrors with any shape of a reflecting surface in the 0.6-20 nm spectral range. The other, designed especially to study the influence of EUV sources on the reflecting characteristics of the mirrors, allows testing of flat samples. Owing to a high aperture ratio (solid angle of 0.034 steradian), high reflection coefficient of mirrors, powerful windowless X-ray tube, and effective detector, the reflectometer provides a resolution of the reflection coefficient variation at a level of 0.1%.