Germanium nanowire epitaxy: Shape and orientation control

Germanium nanowire epitaxy: Shape and orientation control
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DOI:
10.1021/nl052231f
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发表时间:
2006-02-01
期刊:
影响因子:
10.8
通讯作者:
McIntyre, PC
McIntyre, PC
中科院分区:
材料科学1区
文献类型:
--
作者:
Adhikari, H;Marshall, AF;McIntyre, PC

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采用金纳米颗粒催化的化学气相沉积方法,在350℃或更低的温度下,在Si(001)衬底上的Ge(111)、Ge(110)、Ge(001)和异质外延的Ge上,获得了沿< 111 >方向的纳米线外延生长。在Ge(111)上,增长主要是垂直的。在Ge(001)和Ge(110)基质上,除了< 111 >的生长外,还观察到< 110 >的生长。通过使用双温生长程序可以避免逐渐变细,这是Greytak等人早些时候报道的。
Epitaxial growth of nanowires along the < 111 > directions was obtained on Ge(111), Ge(110), Ge(001), and heteroepitaxial Ge on Si(001) substrates at temperatures of 350 degrees C or less by gold-nanoparticle-catalyzed chemical vapor deposition. On Ge(111), the growth was mostly vertical. In addition to < 111 > growth, < 110 > growth was observed on Ge(001) and Ge(110) substrates. Tapering was avoided by the use of the two-temperature growth procedure, reported earlier by Greytak et al.