High-efficiency diffractive x-ray optics from sectioned multilayers
High-efficiency diffractive x-ray optics from sectioned multilayers
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DOI：
10.1063/1.1897061
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发表时间：
2005-04-11
影响因子：
4
通讯作者：
Chapman, HN
中科院分区：
文献类型：
--
作者：
Kang, HC;Stephenson, GB;Chapman, HN
我们调查的衍射特性的切片多层膜在巷（传输）的几何形状，在硬X射线能量（9.5和19.5千电子伏）。两个样品进行了研究，200 X（29纳米）周期的W/Si多层膜，和2020 X（7纳米）周期的Mo/Si多层膜，横截面深度范围从2到17 μ m。观察到高达70%的反射率。这超过了在多光束制度中操作的标准波带片的理论极限，表明所有的强度可以被引导到小周期结构中的单个衍射级。(C)2005年美国物理学会。
We investigate the diffraction properties of sectioned multilayers in Lane (transmission) geometry, at hard x-ray energies (9.5 and 19.5 keV). Two samples are studied, a W/Si multilayer of 200 X (29 nm) periods, and a Mo/Si multilayer of 2020 X (7 nm) periods, with cross-section depths ranging from 2 to 17 mu m. Reflectivities as high as 70% are observed. This exceeds the theoretical limit for standard zone plates operating in the multibeam regime, demonstrating that all of the intensity can be directed into a single diffraction order in small-period structures. (C) 2005 American Institute of Physics.