Compact on-chip crystalline resonator integration with etching of tapered fiber waveguide.
Compact on-chip crystalline resonator integration with etching of tapered fiber waveguide.
复制标题
DOI：
10.1364/ao.477764
复制
发表时间：
2022-11
期刊：
影响因子：
1.9
通讯作者：
Jun Yue;Jiamin Rong;Enbo Xing;Wei‐Qin Xu;J. Bai;Wenyao Liu;Jun Tang;J. Liu
中科院分区：
文献类型：
--
作者：
Jun Yue;Jiamin Rong;Enbo Xing;Wei‐Qin Xu;J. Bai;Wenyao Liu;Jun Tang;J. Liu
回廊模式晶体谐振器目前保持着最佳品质因数 (Q) 记录；然而，尽管已经开发了各种耦合架构，但紧凑的片上封装仍然是一个挑战。这里，提出了一种化学蚀刻方法在硅衬底上制造小型化锥形光纤波导。实施马兰戈尼效应是为了降低锥体区域的表面粗糙度。获得0.1 dB/mm的光学损耗，片上晶体谐振器的Q值超过108。此外，封装中植入热电冷却器（TEC）主动定制温度，18 pm/°C的温度响应与理论计算一致。
Whispering-gallery-mode crystalline resonators currently maintain the best quality factor (Q) record; however, compact on-chip packaging is still a challenge, although various coupling architectures have been developed. Here, a chemical etching method is proposed to fabricate a miniaturized tapered fiber waveguide on silicon substrate. The Marangoni effect is implemented to reduce the surface roughness of the cone region. The optical loss of 0.1 dB/mm is obtained, and the Q of the on-chip crystalline resonator exceeds 108. Additionally, thermoelectric cooler (TEC) is implanted in the package to actively customize the temperature, and the temperature response of 18 pm/°C is consistent with the theoretical calculation.