High fill-factor 60 × 1 SPAD array with 60 sub-nanosecond integrated TDCs
High fill-factor 60 × 1 SPAD array with 60 sub-nanosecond integrated TDCs
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发表时间：
2015
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通讯作者：
F. Villa;R. Lussana;D. Tamborini;A. Tosi;F. Zappa
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作者：
F. Villa;R. Lussana;D. Tamborini;A. Tosi;F. Zappa
本文介绍了一种高填充因子的60×1单光子雪崩二极管（SPAD）线阵和60个集成时间数字转换器（TDC）。直径为100 μm的SPAD具有很高的光子探测效率（420 nm处为50%）、很低的暗计数率（室温下为2.5 kcps）和可忽略的串扰（相邻像素之间约为0.1%）。TDC分辨率为250 ps，其200 ps rms的单次精度仅受量化噪声的限制。由于采用了滑动比例技术，因此可实现非常好的线性度（DNL = 5% LSB rms，INL = 30% LSB rms）。阵列的整体填充因子为52%。该芯片适用于许多先进的光谱应用，因为它在一个集成电路中提供了60个独立的单光子探测器和相应的计数和定时电子器件。索引术语-单光子雪崩二极管（SPAD）; CMOS成像器;时间数字转换器（TDC）;时间相关单光子计数（TCSPC）;飞行时间（TOF）测量;光谱学。
This paper presents a high-fill factor 60×1 linear array of Single-Photon Avalanche-Diodes (SPADs) and 60 integrated Time-to-Digital Converters (TDCs). The 100 μm diameter SPAD has high photon detection efficiency (50% at 420 nm), very low dark count rate (2.5 kcps at room temperature) and negligible crosstalk (about 0.1% between adjacent pixels). The TDC resolution is 250 ps and its single-shot precision of 200 ps rms is limited just by the quantization noise. Very good linearity (DNL = 5% LSB rms, INL = 30% LSB rms) is achieved thanks to the sliding scale technique. The overall fillfactor of the array is 52%. This chip is suitable for many advanced spectroscopic applications, since it provides 60 independent single-photon detectors and the corresponding counting and timing electronics within just one integrated circuit. Index Terms — Single-Photon Avalanche-Diode (SPAD); CMOS imagers; Time-to-Digital Converter (TDC); TimeCorrelated Single-Photon Counting (TCSPC); Time-of-Flight (TOF) measurements; Spectroscopy.