In-situ fiber-based surface profile measurement system using low coherence interferometer
In-situ fiber-based surface profile measurement system using low coherence interferometer
复制标题
使用低相干干涉仪的原位光纤表面轮廓测量系统
DOI：
10.1117/12.2307248
复制
发表时间：
2018
期刊：
影响因子：
--
通讯作者：
Justham L
中科院分区：
文献类型：
--
作者：
Justham L
对于许多高价值的制造应用，需要先进的控制系统来确保产品质量;这需要从现场传感器收集准确的数据。由于制造机器和工艺中的腐蚀性环境，进行精确的现场测量具有挑战性。本文研究了一种在谱域、共光路、低相干系统中获得表面轮廓测量的方法。建立了一种基于光纤的低相干干涉仪，并用于实验测量表面轮廓。从干涉图获得的条纹被转换到傅立叶域，以获得与表面深度相关的可跟踪的峰。这已经用理想的台阶高度测量和参考样本以及更具挑战性的表面粗糙度测量来说明，这些测量产生了复杂的信号处理问题。这项工作为基于计量的系统开辟了道路，在这种系统中，加工和测量系统可以在同一平面上共存，在恶劣的环境中。
For many high-value manufacturing applications, advanced control systems are required to ensure product quality is maintained; this requires accurate data to be collected from in-situ sensors. Making accurate in-situ measurements is challenging due to the aggressive environments found within manufacturing machines and processes. This paper investigates a method to obtain surface profile measurements in a spectral-domain, common-path, low-coherence system. A fibre based Low Coherence Interferometer was built and was used to experimentally measure surface profiles. The fringes obtained from interferograms were transformed into the Fourier domain to obtain a trackable peak relating to the surface depth. This has been illustrated with ideal step height measurements and referenced specimens as well as more challenging surface roughness measurements, which have produced complex signal processing issues. This work opens up avenues for a metrology based system where both machining and measurement system can coexist on the same plane, in aggressive environments.