Finite Element Analysis of Elastic Deformation of Cubic Polycrystalline Thin Films with (001) Fiber Texture
Finite Element Analysis of Elastic Deformation of Cubic Polycrystalline Thin Films with (001) Fiber Texture
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(001)纤维织构立方多晶薄膜弹性变形的有限元分析
DOI：
10.2472/jsms.53.150
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发表时间：
2004
期刊：
影响因子：
--
通讯作者：
Y. Akiniwa
中科院分区：
文献类型：
--
作者：
K. Serizawa;Keisuke Tanaka;Hirohisa Kimachi;Y. Akiniwa
基于蒙特卡罗方法建立了多晶薄膜的有限元模型。该模型由立方晶体的柱状聚集体组成，具有纤维织构，其轴<001>向垂直于膜表面。在蒙特卡罗方法中，晶体的核分布在由随机数产生的位置，采用Voronoi网格划分法，由晶核坐标生成晶界，改变试样体积中晶粒的数量，生成50个不同取向的模型，对模型施加恒定的单轴位移，得到弹性散射系数，并对模型进行了数值模拟，得到了不同取向下的晶界分布。薄膜在平面应变和平面应力条件下的性质。作为样品体积内颗粒数量的函数，得到了杨氏模量和泊松比的分散值和平均值。提出了一种方法，以确定薄膜的情况下，具有不同程度的弹性各向异性的宏观性能的晶粒数的薄膜。
Finite element models of polycrystalline thin films were constructed based on the Monte Carlo method. The models consisted of columnar aggregates of cubic crystals with fiber texture whose axis was <001> direction perpendicular to the film surface. In the Monte Carlo method, the nucleus of a crystal was distributed at positions generated by the random number, and the crystal boundary was formed from the coordinates of the nucleus of crystals by using Voronoi tessellation.The number of grains in a sample volume was changed and fifty models with different orientations were produced for each case.A constant uniaxial displacement was applied to the models to obtain the scatter of elastic properties of thin films under the conditions of plane strain and plane stress. The scatter and mean values of Young's modulus and Poisson' ratio were obtained as functions of the number of the grains within a sample volume. A method is proposed to determine the number of grains for thin films to have macroscopic properties for the cases of various thin films with different degrees of elastic anisotropy.