Single-pulse femtosecond laser machining of glass

Single-pulse femtosecond laser machining of glass
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DOI:
10.1088/1464-4258/7/4/002
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发表时间:
2005-04
影响因子:
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通讯作者:
S. Campbell;Fraser C. Dear;D. Hand;D. Reid
S. Campbell;Fraser C. Dear;D. Hand;D. Reid
中科院分区:
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文献类型:
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作者:
S. Campbell;Fraser C. Dear;D. Hand;D. Reid

文献摘要

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我们描述了在 800 nm 处使用 150 fs 脉冲对玻璃(钛:蓝宝石)进行单脉冲加工的研究,并给出了结果,以定量方式证明了加工质量对焦点位置和激光束脉冲能量的依赖性。我们报告的实验结果表明亚衍射限制结构的创建。根据我们的实验结果推断玻璃烧蚀阈值的理论计算结果为 5.55 J cm−2。还提供了说明加工质量对所用脉冲持续时间的依赖性的结果。详细介绍了一种在低于加工阈值的能量下优化焦点位置的技术,并描述了研究飞秒光束在空气中自聚焦的相关研究的结果。
We describe a study of single-pulse machining of glass with 150 fs pulses at 800 nm (Ti:sapphire) and present results demonstrating in a quantitative way the dependence of the machining quality on the focal position and the pulse energy of the laser beam. We report experimental results indicating the creation of sub-diffraction limited structures. A theoretical calculation of the ablation threshold of glass is inferred from our experimental results to be 5.55 J cm−2. Results are also presented that illustrate the dependence of the machining quality on the pulse duration used. A technique for optimizing the focal position at energies below the machining threshold is detailed and the results of a related study investigating the self-focusing of femtosecond beams in air are described.